Title:
193nmより短い波長を用いた照明光学系のための、不使用領域を持つ集光器
Document Type and Number:
Japanese Patent JP2005501221
Kind Code:
A
Abstract:
The lighting of micro structures uses an optical collector that is rotationally symmetrical about an axis between the light source (1) and the target (5). The collector has a number of mirror shells (40,42,44,46) set around the axis and positioned such that there is no overlapping effect
Inventors:
Wolfgang Zinger
Wilhelm Egret
Marx Weiss
Joachim Heinz
Jochen Vitsolek
Frank Melzer
Johannes Wangler
Wilhelm Egret
Marx Weiss
Joachim Heinz
Jochen Vitsolek
Frank Melzer
Johannes Wangler
Application Number:
JP2002565318A
Publication Date:
January 13, 2005
Filing Date:
January 23, 2002
Export Citation:
Assignee:
Carl Zeiss SMT AG
International Classes:
G02B5/10; G02B5/09; G02B17/06; G02B19/00; G03F1/16; G03F7/20; G21K1/06; G21K5/00; G21K5/02; G21K5/04; H01L21/027; (IPC1-7): G21K1/06; G03F7/20; G21K5/00; G21K5/02; H01L21/027
Domestic Patent References:
| JPS5455177A | 1979-05-02 | |||
| JPH11219900A | 1999-08-10 | |||
| JPH11243052A | 1999-09-07 | |||
| JP2001013297A | 2001-01-19 | |||
| JPH01307221A | 1989-12-12 | |||
| JPH0438500A | 1992-02-07 |
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Yasuhiko Murayama
Shinya Mitsuhiro
Masatake Shiga
Yasuhiko Murayama
Shinya Mitsuhiro