Title:
CONDENSER USED IN BUBBLING APPARATUS
Document Type and Number:
Japanese Patent JP2969101
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To keep the concn. of a raw material fed into a reacting part const. and to make the amt. of taking out of the raw material into the reacting part const.
SOLUTION: In a bubbling apparatus wherein a carrier gas is blown into a raw material in a bubbler container to prepare a mixed gas of the carrier gas and the raw material by bubbling and the mixed gas is condensed by means of a condenser to make a satd. vapor at a required temp. and the raw material with a required concn. incorporated in the satd. vapor is fed into the reacting part, the condenser is constituted of a static mixer 9 wherein the mixed gas sent from the bubbler container and flowing inside is mixed, a holding member 10 prepd. by using a material with good heat conductivity surrounding the whole periphery of the mixer 9 and a temp. sensor for detecting temp. of the holding member 10. In addition, a heater 12 for heating the holding member 10 and a thermoelectric converting element 13 for cooling the holding member 10 are provided on the condenser 4 and the heater 12 and the thermoelectric converting element 13 are controlled based on the detected value of the temp. sensor so as to keep the temp. of the mixed gas flowing in the mixer 9 at a const. temp.
Inventors:
KOMYA MITSUNORI
Application Number:
JP8135398A
Publication Date:
November 02, 1999
Filing Date:
March 27, 1998
Export Citation:
Assignee:
APURIORI KK
International Classes:
B01D5/00; B01J7/02; C03B37/014; C23C16/448; (IPC1-7): B01J7/02
Domestic Patent References:
| JP61257232A | ||||
| JP268132A | ||||
| JP8303902A | ||||
| JP671542B2 |
Attorney, Agent or Firm:
Akihiro Otsuka (1 person outside)