Title:
集光鏡方式加熱炉
Document Type and Number:
Japanese Patent JP6732235
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve the problem that in a conventional light collection mirror type heating furnace, it is difficult to attain both of cooling efficiency and downsizing of a device.SOLUTION: In a light collection mirror type heating furnace, light radiated from a light source is reflected by a reflection mirror to irradiate a heated object, and thereby the heated object is heated. The light source, and the reflection mirror and the heated object are sectioned by a wall having a window member having infrared permeability to be positioned to independently individual chambers. Light radiated to a heated object surface penetrates the window member having infrared permeability to irradiate the heated object.SELECTED DRAWING: Figure 1
Inventors:
Shinichi Ikeda
Takanori Sangahara
Noriko Miura
Kumpuan Somawan
Shiro Hara
Yasuhiro Onishi
Takeshi Yamada
Aizawa Ko
Mitsunori Nogawa
Takanori Sangahara
Noriko Miura
Kumpuan Somawan
Shiro Hara
Yasuhiro Onishi
Takeshi Yamada
Aizawa Ko
Mitsunori Nogawa
Application Number:
JP2014244539A
Publication Date:
July 29, 2020
Filing Date:
December 02, 2014
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Yonekura Manufacturing Co., Ltd.
Yonekura Manufacturing Co., Ltd.
International Classes:
F27B17/00; C03B19/00; C03C17/22; C23C14/50; C23C16/48; C30B25/10; F27D11/02; H01L21/205; H01L21/26; H01L21/31
Domestic Patent References:
| JP10082589A | ||||
| JP9072669A | ||||
| JP2004303672A | ||||
| JP55042284A | ||||
| JP6215616A | ||||
| JP62127472A | ||||
| JP2000138006A | ||||
| JP2002305153A | ||||
| JP2004296558A | ||||
| JP2282689A |
Foreign References:
| WO2013081107A1 |
Attorney, Agent or Firm:
Zentaro Hasebe
Yasuyuki Yamada
Yasuyuki Yamada