Title:
CONDITIONER AND METHOD FOR CONTROLLING THE SAME
Document Type and Number:
Japanese Patent JP2023159885
Kind Code:
A
Abstract:
To provide a conditioner capable of restoring a polishing pad with reduced polishing performance to be reusable.SOLUTION: The invention includes a conditioner and a method of controlling the same. In particular, according to one embodiment of the invention, the conditioner includes: an injector jetting steam to a rotating polishing pad; and an injector support body supporting the injector. The injector includes a plurality of nozzles jetting steam to the polishing pad and a nozzle heater heating the plurality of nozzles. In the conditioner, the nozzle heater heats nozzles arranged to correspond to a peripheral region of the polishing pad, among the plurality of nozzles, to a higher temperature than nozzles arranged to correspond to a central area of the polishing pad among the plurality of nozzles.SELECTED DRAWING: Figure 1
Inventors:
YUN JONG WOOK
SEO JANG WON
MOON SU YOUNG
KIM KYUNG HWAN
KWON TAE KYOUNG
SEO JANG WON
MOON SU YOUNG
KIM KYUNG HWAN
KWON TAE KYOUNG
Application Number:
JP2023068905A
Publication Date:
November 01, 2023
Filing Date:
April 19, 2023
Export Citation:
Assignee:
SK ENPULSE CO LTD
International Classes:
B24B53/017; B24B49/14; B24B49/18; B24B53/00; B24B53/12; H01L21/304
Attorney, Agent or Firm:
SK Patent Attorney Corporation
Akihiko Okuno
Hiroyuki Ito
Akihiko Okuno
Hiroyuki Ito