CONDITIONING DEVICE, BUFF PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS, DRESSER, AND CONDITIONING METHOD

Title:

CONDITIONING DEVICE, BUFF PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS, DRESSER, AND CONDITIONING METHOD

Document Type and Number:

Japanese Patent JP2016119368

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a compact conditioning device capable of performing the conditioning of more than one type.SOLUTION: A conditioning device for conditioning a buff pad for use in buff processing includes a base plate configured rotatably, a first conditioning section provided in the installation region of the base plate, and a second conditioning section provided in the installation region of the base plate, and having the conditioning characteristics different from those of the first conditioning section.SELECTED DRAWING: Figure 6A

Inventors:

YAMAGUCHI KUNIAKI
OBATA ITSUKI
MIZUNO TOSHIO

Application Number:

JP2014257563A

Publication Date:

June 30, 2016

Filing Date:

December 19, 2014

Export Citation:

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Assignee:

EBARA CORP

International Classes:

H01L21/304; B24B29/00; B24B37/20; B24B53/00

Attorney, Agent or Firm:

Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Mitsuru Ueda

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