Title:
CONDUCIVE THIN FILM
Document Type and Number:
Japanese Patent JP2010018864
Kind Code:
A
Abstract:
To provide a thin film of several m or below having conductivity and sufficient damage resistance (hardness) and exhibiting a blackish color tone when a base material is covered therewith.
The aluminum nitride based conductive thin film , which is formed by being covered on the surface of a base material using a vapor deposition material composed of aluminum and manganese and an atmospheric gas obtained by mixing nitrogen into a rare gas according to a physical vapor deposition process, contains, by atom, 2 to 25% Mn and 10 to 50% N, and, provided that the respective contents (at%: atomic concentration) of the Mn and N are expressed as [Mn] and [N], 10/15[Mn]+50/15[N]20/18[Mn]+500/18 is satisfied.
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Inventors:
MIZUNO MASAO
Application Number:
JP2008181841A
Publication Date:
January 28, 2010
Filing Date:
July 11, 2008
Export Citation:
Assignee:
KOBE STEEL LTD
International Classes:
C23C14/06; C22C29/16; H01B5/14
Domestic Patent References:
| JPH06322517A | 1994-11-22 |
Attorney, Agent or Firm:
Isono Dozo
Etsuo Tada
Tetsuo Tomita
Etsuo Tada
Tetsuo Tomita