Title:
導電性組成物及びその製造方法
Document Type and Number:
Japanese Patent JP7400237
Kind Code:
B2
Abstract:
To provide a conductive composition capable of forming a coating film which hardly causes a patterning failure when a pattern is formed on a resist layer using a charged particle beam while maintaining coating properties.SOLUTION: There is provided a conductive composition which contains a conductive polymer (A), a water-soluble polymer and a solvent (C), wherein when a test solution obtained by extracting the water-soluble polymer (B) is measured using a high performance liquid chromatograph mass spectrometer, the area ratio calculated by following expression (I) is 0.2 or less: area ratio=Y/X (I) (in the expression (I), X is the sum of peak area values when an extracted ion chromatogram is prepared from a total ion current chromatogram using ions derived from a compound having a molecular weight (M) of 900 or less and Y is the sum of peak area values when an extracted ion chromatogram is prepared from a total ion current chromatogram using ions derived from a compound represented by the following formula (1) of the compounds having a molecular weight (M) of 900 or less compounds.SELECTED DRAWING: None
Inventors:
Masashi Uzawa
Saki Makikawa
Yoshiko Irie
Saki Makikawa
Yoshiko Irie
Application Number:
JP2019135270A
Publication Date:
December 19, 2023
Filing Date:
July 23, 2019
Export Citation:
Assignee:
Mitsubishi Chemical Corporation
International Classes:
C08L101/12; C08L39/06; C08L79/00; H01B1/20
Domestic Patent References:
| JP2017179324A | ||||
| JP2019085557A | ||||
| JP2005272638A | ||||
| JP2009230885A | ||||
| JP2017039927A | ||||
| JP2016145319A |
Foreign References:
| WO2018147318A1 |
Attorney, Agent or Firm:
田▲崎▼ 聡
Shunsuke Fushimi
Onami Kazunori
Shunsuke Fushimi
Onami Kazunori