Title:
導電性酸化物とその製造方法
Document Type and Number:
Japanese Patent JP5494082
Kind Code:
B2
Inventors:
Miyanaga Miki
Kenichiro Shibata
Nagasawa Moto
Yoshimura Masashi
Hiroshi Okada
Koichi Sokabe
Kenichiro Shibata
Nagasawa Moto
Yoshimura Masashi
Hiroshi Okada
Koichi Sokabe
Application Number:
JP2010065884A
Publication Date:
May 14, 2014
Filing Date:
March 23, 2010
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/203; C01G15/00; C23C14/34
Domestic Patent References:
| JP2005314734A | ||||
| JP2008285760A | ||||
| JP2005307269A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki