Title:
CONFOCAL POINT MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2014178287
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a confocal point measuring device capable of measuring at high speed and capable of minimizing a device size and performing multipoint measurement of the displacement of an object to be measured.SOLUTION: A confocal point measuring device 100 performs multipoint measurement of the displacement of an object to be measured 200 using a confocal point optical system. The confocal point measuring device 100 includes: a light source 21; a head part 10; a spectrometer 23; and an image pickup device 24. The confocal point measuring device 100 irradiates light causing chromatic aberration of axis to the object to be measured 200 by a plurality of head parts 10, allowing light focused in the object 200 to be measured to pass through, and inputs the light having passed through the plurality of head parts 10 by a splicing optical fiber and an optical fiber 11 to one spectrometer 23. Further, the confocal point measuring device 100 receives spliced light by the image pickup device 24 arranged in a one-dimensional manner in a spectral direction by a spectral part, and obtains a peak wavelength corresponding to each of the plurality of head parts 10 from light received by the image pickup device 24 in a control circuit part 25.
Inventors:
ARAKAWA MASAYUKI
MATSUI YUUKI
HAYAKAWA MASAYUKI
OTA JUN
MATSUI YUUKI
HAYAKAWA MASAYUKI
OTA JUN
Application Number:
JP2013054037A
Publication Date:
September 25, 2014
Filing Date:
March 15, 2013
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G01B11/00; G01C3/06
Domestic Patent References:
| JP2012047743A | 2012-03-08 | |||
| JP2006058056A | 2006-03-02 | |||
| JP2011017552A | 2011-01-27 | |||
| JPS6073405A | 1985-04-25 | |||
| JP2007040714A | 2007-02-15 | |||
| JP2012208102A | 2012-10-25 |
Attorney, Agent or Firm:
Patent business corporation Fukami patent firm