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Patent Searching and Data


Title:
CONFOCAL SCANNING OPTICAL MICROSCOPE
Document Type and Number:
Japanese Patent JPH08190053
Kind Code:
A
Abstract:

PURPOSE: To prevent the collision of a sample with an objective lens.

CONSTITUTION: In a confocal scanning optical microscope comprising an objective lens 7 converging a transmitted light beam from a light source 2 on a sample 8, a photodetector 13 detecting a beam from the sample 8, a scanning mechanism 5 two-dimensionally and relatively scanning the light beam converged on the sample 8 and the sample 8 and a moving mechanism for relatively scanning the focal position of the objective lens 7 and the position of the sample 8 in the direction of the optical axis, in order to decide the observing range or the measuring range of the sample 8, first, only the movement in the direction in which the objective lens 7 approaches the sample 8 is permitted, when the focal position of the objective lens 7 is moved to the uppermost surface of the sample 8, this position is made to be an upper limit, the movement in the direction in which the focal position of the objective lens 7 is approached to or separated from the sample 8 is succesively permitted so that the position on which the focal position reaches the lowermost surface of the sample 8 is found and the function for stopping the movement is given when the moving amount exceeds the working distance of the objective lens 7.


Inventors:
KITA NOBUHIRO
Application Number:
JP256095A
Publication Date:
July 23, 1996
Filing Date:
January 11, 1995
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B21/00; (IPC1-7): G02B21/00
Attorney, Agent or Firm:
Takehiko Suzue