Title:
CONNECTING STRUCTURE OF VACUUM EVACUATION DEVICE AND VACUUM EVACUATION DEVICE
Document Type and Number:
Japanese Patent JP2014029114
Kind Code:
A
Abstract:
To provide a connecting structure of a vacuum evacuation device capable of suppressing pressure loss due to piping, and saving space and reducing costs.
Vacuum evacuation devices (1A, 1B) respectively include pump chambers (21A, 21B, 22A, 22B) and intake ports (31A, 31B) and/or exhaust ports (41A, 41B) in communication with the pump chambers. A connecting structure of the vacuum evacuation devices is constructed so that at least one pump chamber (22A) of one vacuum evacuation device (1A) and at least one pump chamber (21B) of the other vacuum evacuation device (1B) are in direct communication with each other when the vacuum evacuation devices are disposed in direct contact with each other.
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Inventors:
SUZUKI TOSHIO
SHIBAYAMA KOJI
SHIBAYAMA KOJI
Application Number:
JP2010257142A
Publication Date:
February 13, 2014
Filing Date:
November 17, 2010
Export Citation:
Assignee:
ULVAC CORP
International Classes:
F04C23/00
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki