Title:
LASER INTERFERENCE MEASUREMENT METHOD AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3178073
Kind Code:
B2
Abstract:
PURPOSE: To enable a measurement object travelling at high speed to be observed in still state and at high brightness.
CONSTITUTION: A laser beam of a CW laser is irradiated to a measurement object housed in a vessel 4, and interference measurement instruments 1 to 7 forming an interference beam, or holography measurement instruments are provided. Furthermore, the laser medium of a metal vapor laser 10 allowing the incidence of an interference beam from the instruments 1 to 7, and emitting a laser beam having the same wavelength as the interference beam is provided, together with a CCD camera 11 for observing the interference beam amplified and taken out through the medium.
Inventors:
Kiyohide Sekimoto
Shigeru Yamaguchi
Yasuhiro Tomioka
Tatsumi Fujimoto
Shigeru Yamaguchi
Yasuhiro Tomioka
Tatsumi Fujimoto
Application Number:
JP9550092A
Publication Date:
June 18, 2001
Filing Date:
April 15, 1992
Export Citation:
Assignee:
Ishikawajima Harima Heavy Industries Co., Ltd.
International Classes:
G01B9/02; H01S3/00; (IPC1-7): G01B9/02; H01S3/00
Domestic Patent References:
| JP2257124A | ||||
| JP5160466A |
Attorney, Agent or Firm:
Nobuo Kinutani (1 outside)
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