Title:
CONSTANT CURRENT TYPE BEAM IRRADIATION HEATING RESISTANCE CHANGE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3825542
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a constant current type OBIRCH (resistance change by heating through beam irradiation) measuring device capable of measuring even a sample of great internal resistance at a high S/N ratio.
SOLUTION: A sample 4 is scanned with a laser beam by a laser beam generating part 1, a laser beam scanning part 2, and a microscope 3. A sample 4 grounded at one end has a constant current source 5 connected in series with the other end via a feedback circuit 6. The constant current source 5 comprises a reference voltage source 51, a resistance 52, an operational amplifier 53, and a FET 54 and outputs a predetermined current in response to a control signal from a signal processing part 8. The feedback circuit 6 comprises a reference voltage source 61, an operational amplifier 62, and a source follower FET 63, and applies a voltage Vdd equal to a sample resistance R × the constant current I to the sample 4. A change in voltage of the sample 4 is detected by a voltage change detecting part 7, transmitted to the signal processing part 8, and displayed on a monitor 9.
Inventors:
Yuji Nakajima
Application Number:
JP27732297A
Publication Date:
September 27, 2006
Filing Date:
October 09, 1997
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01R27/08; G01R31/26; H01L21/66; G01R31/302; (IPC1-7): G01R31/302; G01R27/08; G01R31/26; H01L21/66
Domestic Patent References:
| JP5053663A | ||||
| JP8160095A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Kazuo Yoshii
Tatsuya Shioda
Shiro Terasaki
Kazuo Yoshii