To efficiently control temperature and humidity in a chamber by reducing humidification in the chamber caused by water attached to a cooler when carrying out dehumidification control.
The moisture condensation of air in the chamber is preferentially carried out to an inlet pipe 18 of a cooler when dehumidification control is carried out by providing the inlet pipe 18 of the cooler having a diameter nearly equivalent to pipe used in the cooler 7 on the outside of air-circulating air pathway 17 in the chamber and between a depressing apparatus 19 and the cooler 7, and humidification in the chamber, when dehumidification control is finished and cooling operation in the chamber is restarted, is suppressed and the temperature and humidity in the chamber can efficiently be controlled by discharging water from a drain pan 23.
TSUKAMOTO HIROSHI
MATSUNAGA TAKUYA
Tomoyasu Sakaguchi
Hiroki Naito
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