Title:
CONSTANT TEMPERATURE LIQUID SUPPLY DEVICE
Document Type and Number:
Japanese Patent JP2023023042
Kind Code:
A
Abstract:
To adjust liquid to a prescribed temperature by a small-sized configuration which is simple and at operation cost.SOLUTION: A constant temperature liquid supply device for supplying liquid with an adjusted temperature to a processing device provided with a processing unit having a spindle attached with a processing tool and a motor for rotating the spindle includes a tank for storing the liquid, a thermometer for measuring the temperature of the liquid stored in the tank, and a compressed gas supply pipe, the one end of which is connected to a compressed gas source for storing a compressed gas, the other end of which reaches the tank to supply the compressed gas from the compressed gas source to the tank, and cools the liquid stored in the tank with bubbles of the compressed gas, and supplies the cooled liquid to the processing device.SELECTED DRAWING: Figure 3
Inventors:
SEKIYA KAZUMA
YOSHIDA MIKI
MINE MEGUMI
YOSHIDA MIKI
MINE MEGUMI
Application Number:
JP2021128202A
Publication Date:
February 16, 2023
Filing Date:
August 04, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/02; B23Q11/10; B23Q11/12; B24B27/06; B24B49/14; H01L21/301
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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