Title:
CONSTITUENT MEMBER OF CHAMBER FOR MANUFACTURE OF SEMICONDUCTOR
Document Type and Number:
Japanese Patent JP3808245
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide the constituent member of a chamber for manufacturing a semiconductor of superior plasma resistance and thermal conductivity.
SOLUTION: This constituent member of a chamber is made of ceramics having 20 W/mK or over in heat conductivity where compounds containing crystalline rare earth elements are dispersed at a percentage of 10-60 volume % in the ceramic matrix, having at least one kind out of alumina and AlN for its main components. These compounds, containing the rare earth elements consist of an least one kind being selected from among a group of crystalline compounds between rare earth element-alumina composite oxides or rare earth element oxides and the matrix components. Furthermore, it is desirable that the porosity of the ceramics be 0.2% or lower, and that the ceramic matrix should have thermal conductivity of 30 W/mK or higher in single bodies.
Inventors:
Yumiko Ito
Masahiro Nakahara
Masahiro Nakahara
Application Number:
JP21701399A
Publication Date:
August 09, 2006
Filing Date:
July 30, 1999
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/302; C04B35/10; C04B35/44; C04B35/581; H01L21/3065; (IPC1-7): H01L21/3065; C04B35/10; C04B35/44; C04B35/581
Domestic Patent References:
| JP10275524A | ||||
| JP3257071A | ||||
| JP1045461A |