Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
Constituent
Document Type and Number:
Japanese Patent JP6011234
Kind Code:
B2
More Like This:
JP2003124310METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
WO/2022/005704METHODS FOR PRODUCING HIGH-DENSITY CARBON FILMS FOR HARDMASKS AND OTHER PATTERNING APPLICATIONS
JP2005197474METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Inventors:
Takaaki Nado
Nakao Takeo
Kamidai Yasushi
Maki Inada
Kyoko Kuroda
Application Number:
JP2012229275A
Publication Date:
October 19, 2016
Filing Date:
October 16, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/308; H01L21/306
Domestic Patent References:
JP2010512028A
JP2006059831A
JP2003510297A
JP11121442A
JP2010202547A
JP2012529163A
Foreign References:
WO2010139390A1
WO2008070087A2
WO2004097918A1
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka



 
Previous Patent: A nonaqueous electrolyte secondary battery and a battery system

Next Patent: METHOD AND DEVICE FOR FORMING GLASS PLATE