Title:
Constituent
Document Type and Number:
Japanese Patent JP6031939
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a novel composition which can be used as etching paste.SOLUTION: A composition contains the following components (A) and (B): (A) boron trifluoride complex salt and (B) ionic liquid including a fluorine atom.
More Like This:
| JP2713379 | [Title of Invention] Hydraulic Polymer Preparation |
| WO/2014/192266 | ETCHING COMPOSITION |
Inventors:
Takaaki Nado
Tomoaki Tsukahara
Kamidai Yasushi
Nakao Takeo
Maki Inada
Kyoko Kuroda
Tomoaki Tsukahara
Kamidai Yasushi
Nakao Takeo
Maki Inada
Kyoko Kuroda
Application Number:
JP2012229281A
Publication Date:
November 24, 2016
Filing Date:
October 16, 2012
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
C09K13/10; C09K13/08; H01L21/306
Domestic Patent References:
| JP2009021538A | ||||
| JP2006173292A | ||||
| JP2012033561A |
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka
Yuko Tanaka