Title:
CONSUMABLE PART MONITORING IN CHEMICAL MECHANICAL POLISHER
Document Type and Number:
Japanese Patent JP2023178295
Kind Code:
A
Abstract:
To provide a polishing apparatus for consumable part monitoring.SOLUTION: A polishing apparatus includes a polishing station to hold a polishing pad, a carrier head to hold a substrate in contact with the polishing pad at the polishing station, a camera positioned to capture an image of a lower surface of a consumable part when the consumable part moves from the polishing pad, and a controller configured to apply an image processing algorithm to the image to determine whether the consumable part is damaged. The consumable part can be a retaining ring on a carrier head, or a conditioner disk on a conditioner head.SELECTED DRAWING: Figure 1
Inventors:
THOMAS H OSTERHELD
DOMINIC J BENVEGNU
DOMINIC J BENVEGNU
Application Number:
JP2023160206A
Publication Date:
December 14, 2023
Filing Date:
September 25, 2023
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
B24B53/00; B24B37/30; B24B37/34; B24B49/12; B24B53/017; B24B53/12; H01L21/304; H01L21/677
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki
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