To obtain a gas sensor having high sensitivity and durability by providing a sol-gel machined catalyst layer on a temperature measuring layer formed on a basic material.
In the contact heat quantity analyzing sensor, a temperature measuring layer 32 is formed on a basic material 30. A catalyst layer 34 formed by sol-gel machining is subjected to oxidation of a combustible gas at a temperature of 300-500°C above the temperature measuring layer 32. The basic material 30 preferable has thickness in the range of 500-1000nm and composed of a material having low thermal conductivity, e.g. ceramic or silicon having micromachined structure. The ceramic material preferably includes aluminum oxide, silicon oxide, polysilicon, silicon nitride and combinations thereof. The catalyst layer 34 is a thin coating of alumina and/or silica having large surface area subjected to sol-get machining. It can be machined easily and enhances the sensitivity and durability of sensor.
CHIYAITANYA KUMAA NARURA
MAAGERITA ZANINI-FUITSUSHIYAA
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