To provide a contact structure capable of stably performing opening/closing operation by making a contact surface shape less likely to be changed, and also to provide a manufacturing method of the contact structure and a micro relay using the contact structure.
A contact structure 8 of a micro relay includes a fixed contact 1 and a movable contact 2. At least one of the contacts has an elastic material 3a on the surface of a silicon or glass substrate. With a plurality of convex parts 3b made of the elastic material 3a used as a foundation, convex contact parts 4 are provided by forming a film in such a manner as to cover the convex parts 3b with a contact material. The plurality of convex contact parts 4 are formed at positions to be threefold symmetric with respect to an axis passing through a center X on a contact surface 7 in plan view.
BABA TORU
HASHIMOTO TAKESHI
HAYAZAKI YOSHIKI
IWANO HIROSHI
KAJITA SUSUMU
YOKOYAMA KOJI
SHIRAI TAKEO
ADACHI MASAKAZU
Daisuke Nagano
Kentaro Fujii