To provide a contact switch capable of controlling generation of stiction at a contact part and achieving a longer life; and to provide a semiconductor device, a module, and an electronic equipment with the built-in contact switch.
The contact switch 11A is provided on a signal circuit 12 with a fixed contact 23 and a movable contact 24 facing the fixed contact 23. On the fixed contact 23, there is provided a sliding face 25 (a curved face of a concave shape) and a sliding face 26 (a curved face of a convex shape) corresponding to the sliding face is provided on the movable contact 24. A degree of curvature (a curveture ratio) of the sliding face 26 of the movable contact 24 side is set to be larger than that of the sliding face 25 of the fixed contact 23 side. At an ON operation, the movable contact 24 displaces toward the fixed contact 23 side and contact with each other, while it performs a sliding action, or the sliding face 26 is elastically deformed along the sliding face 25.
MITARAI TAKASHI
Yasushi Santanzaki
Masao Hasebe
Takaaki Tanaami
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