PURPOSE: To arrange a terminal for driving and a common terminal on one side of a substrate by projecting and extending one position or more in a transparent conduc tive film disposed in the main scanning direction in a beltlike manner on an a.Si film, etc. in the sub-scanning direction on the driving circuit element side.

CONSTITUTION: An a.Si film 21 forming an a.Si diode 2 for a photoelectric conversion element is arranged on one side of a substrate 1 in a beltlike manner, and a common electrode consisting of a first metallic film 41a as a lower layer is disposed at an end section on one side of the film 21. A transparent conductive film 22 is shaped onto the a.Si film 21 in the beltlike manner up to the other end from one end in the main scanning direction, and connected electrically to the first metallic film 41a. The beltlike transparent conductive film 22 is extended to the arrangement side of circuit elements 3 for driving in the sub-scanning direction at one position or more to shape projecting sections 8, and connecting-line patterns among the projecting sections 8 and the common electrode 41a are guided up to an end section of the other side of the substrate 1 in the same sub-scanning direction as connecting-line patterns with second metallic films 42b of the circuit elements 3 for driving, thus extracting a common terminal 5 for the common electrode in the same direction as a terminal 6 for driving a circuit and the substrate 1.