Title:
コンタクトユニット及び検査治具
Document Type and Number:
Japanese Patent JP6525831
Kind Code:
B2
Abstract:
A contact unit which is to be detachably attached to a body of an inspection jig, includes: a flexible board which is provided with a contact part to be in contact with an object to be inspected, on one face thereof; a support member which is configured to support the flexible board; and a block which is provided on a side of the other face of the flexible board. A first ground pattern is provided on the one face of the flexible board, a signal pattern is provided on the other face of the flexible board, a through hole for electrically connecting the signal pattern to the contact part is formed in the flexible board, and the first ground pattern covers the signal pattern with the flexible board interposed between the first ground pattern and the signal pattern.
Inventors:
Takahiro Nagata
Application Number:
JP2015182081A
Publication Date:
June 05, 2019
Filing Date:
September 15, 2015
Export Citation:
Assignee:
Yokoo Co., Ltd.
International Classes:
G01R1/073; G01R31/26; G01R31/28; H01L21/66
Domestic Patent References:
| JP644042A | ||||
| JP2002139547A | ||||
| JP2126160A | ||||
| JP2237131A | ||||
| JP62182672A |
Foreign References:
| EP0230348A2 |
Attorney, Agent or Firm:
Takashi Murai
Hiromi Murai
Hiromi Murai