PURPOSE: To prevent generation of dust from a guide way when a wafer holder is moved by driving the wafer holder through a linear motor mechanism.
CONSTITUTION: Permanent magnets 3 are fixed at lower end sections and left/ right end sections of a wafer holder 2. Diamagnetic bodies 5 are arranged at the positions of a guide way 4 corresponding to the permanent magnets 3, and a pipe 6 for cooling the diamagnetic body 5 to a temperature for exhibiting diamagnetism is arranged in the guide way 4. A magnet 7 is arranged in the center of the guide way, and a transmitter 7a comprising a wafer holder position sensing means and a wafer moving direction indicating means is provided. A photo-electric generating means 8 such as a solar cell, a switching means 9, conductive wires 10 and a supporting rod 11 are arranged at the lower section of the wafer holder 2.
| JP2665609 | Description: Travel control method for a moving body driven by a linear motor. |
| JPH08138305 | MEDIUM CONVEYING SYSTEM |
| WO/2022/125292 | CONVEYOR TRANSFER SYSTEM |
OGATA HISANAO
OOTAKE IKUJI
MATSUSHITA OSAMI
MIZUMOTO MUNEO
Next Patent: AUTOMATIC RUNNING SPEED CONTROLLER FOR BATTERY-OPERATED FORKLIFT