Title:
コンタクタ及びコンタクタを使用した試験方法
Document Type and Number:
Japanese Patent JP4467721
Kind Code:
B2
Abstract:
A contactor is provided which contactor comprises an insulating substrate, a concave portion formed in the insulating substrate and extending in a perpendicular direction from a surface thereof, and elastic conductive particles disposed in the concave portion. A part of one of the conductive particles protrudes from the surface of the insulating substrate.
Inventors:
Shigeyuki Maruyama
Takashi Susumu
Watanabe going straight
Takafumi Hataya
Ei Yano
Ichiro Midorikawa
Takashi Susumu
Watanabe going straight
Takafumi Hataya
Ei Yano
Ichiro Midorikawa
Application Number:
JP2000191405A
Publication Date:
May 26, 2010
Filing Date:
June 26, 2000
Export Citation:
Assignee:
Fujitsu Microelectronics Limited
International Classes:
G01R31/26; G01R1/067; G01R1/073; H01L21/66; H01L23/498; G01R1/04
Domestic Patent References:
| JP61265827A | ||||
| JP3502388A | ||||
| JP11072512A | ||||
| JP2000150591A | ||||
| JP57036841A |
Attorney, Agent or Firm:
Tadahiko Ito