Title:
CONTAINER AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
Japanese Patent JP2022184797
Kind Code:
A
Abstract:
To provide a container for storing a substrate type sensor.SOLUTION: A container includes: a body having a storage space whose one side is opened; a door for selectively opening/closing the storage space; a shelf part that supports a substrate type sensor in the storage space; and a charging module for charging the substrate type sensor supported by the shelf part. The charging module may include a charging unit that is provided so as to be movable between a standby position and a charging position for charging the substrate type sensor supported by the shelf part.SELECTED DRAWING: Figure 28
Inventors:
LEE CHUNG WOO
Application Number:
JP2022087346A
Publication Date:
December 13, 2022
Filing Date:
May 30, 2022
Export Citation:
Assignee:
SEMES CO LTD
International Classes:
H01L21/673
Domestic Patent References:
| JP2007536726A | 2007-12-13 | |||
| JP2013163837A | 2013-08-22 | |||
| JP2010283174A | 2010-12-16 | |||
| JP2013506297A | 2013-02-21 | |||
| JP2012079941A | 2012-04-19 |
Foreign References:
| US20080228430A1 | 2008-09-18 |
Attorney, Agent or Firm:
Ryoichi Takaoka
Nao Oda
Akiyo Iwahori
Rena Miyoshi
Kamoto Takahashi
Nao Oda
Akiyo Iwahori
Rena Miyoshi
Kamoto Takahashi