Title:
CONTAINMENT APPARATUS
Document Type and Number:
Japanese Patent JP2018013278
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a containment apparatus capable of securing an atmosphere in a processing space from leaking out even when a worker opens an opening/closing door.SOLUTION: A vacuum dryer 1 as a containment apparatus comprises: a body part 2 having a mount part 370 having a processed body MD arranged in a processing space SP; an opening/closing door 3 closing an opening part 2H of the body part 2 in an openable/closable state; an exhaust fan 16 for exhausting air of the atmosphere in the processing space SP out of the body part 2 through an exhaust path 20; and a control part 100 which actuates the exhaust fan 16. The control part 100 actuates the exhaust fan 16 before the opening/closing door 3 is opened so as to exhaust the air in the processing space SP so that the pressure in the processing space SP is negative voltage or zero.SELECTED DRAWING: Figure 7
Inventors:
HONMA HIROYUKI
KITSUTA HIDEMASA
SAITO TETSUO
KITSUTA HIDEMASA
SAITO TETSUO
Application Number:
JP2016142156A
Publication Date:
January 25, 2018
Filing Date:
July 20, 2016
Export Citation:
Assignee:
YAMATO SCIENT CO LTD
International Classes:
F26B9/06; B01D46/00; F24F7/06; F24F13/28; F26B5/04; F26B25/00
Domestic Patent References:
| JP2011171593A | 2011-09-01 | |||
| JPH0252981A | 1990-02-22 | |||
| JPS59161492U | 1984-10-29 | |||
| JP2001149726A | 2001-06-05 | |||
| JP2015093367A | 2015-05-18 | |||
| JP2014162611A | 2014-09-08 | |||
| JPH0471436U | 1992-06-24 | |||
| JPH10103869A | 1998-04-24 | |||
| JP2004074013A | 2004-03-11 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu