Title:
汚染堆積物の定量方法および試料分析方法
Document Type and Number:
Japanese Patent JP7024490
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable accurate quantification of contaminants deposited on a surface of a sample when analyzing the sample using a transmission electron microscope.SOLUTION: A method of quantifying contaminants deposited on a surface of a sample when analyzing the sample using a transmission electron microscope is provided, the method comprising: a deposition step for irradiating the surface of the sample with an electron beam to allow deposition contaminants originating from hydrocarbon components present in the atmosphere to deposit in an irradiated area; an acquisition step for irradiating the surface of the sample with the electron beam covering the area in which the deposition contaminants deposit in order to acquire a high-angle annular dark-field image; and a quantification step for measuring brightness of the area with the deposited contaminants in the high-angle annular dark-field image to quantify the deposited contaminants from the brightness.SELECTED DRAWING: Figure 1
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Inventors:
Nobuman Oshimura
Application Number:
JP2018029623A
Publication Date:
February 24, 2022
Filing Date:
February 22, 2018
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
G01N23/04; G01B15/02; G01N23/20; H01J37/26
Domestic Patent References:
| JP2008130428A | ||||
| JP2002221413A | ||||
| JP2014146523A | ||||
| JP2012068197A | ||||
| JP2010539991A | ||||
| JP11329328A |
Foreign References:
| US20150060701 |
Attorney, Agent or Firm:
Setsiya Aniya
Masahiro Fukuoka
Masahiro Fukuoka