Title:
Continuation diffusion treatment device
Document Type and Number:
Japanese Patent JP5953401
Kind Code:
B2
Inventors:
Kiyohiko Morikawa
Katsuhisa Kasatsu
Keisuke Nishimura
Shinoda Ashida
Katsuhisa Kasatsu
Keisuke Nishimura
Shinoda Ashida
Application Number:
JP2015102385A
Publication Date:
July 20, 2016
Filing Date:
May 20, 2015
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H01L21/22; F27B9/04; F27B9/26; F27B9/40; F27D7/06; F27D19/00; H01L21/677
Domestic Patent References:
| JP43026809B1 | ||||
| JP60029295B2 | ||||
| JP7326785A | ||||
| JP9148259A | ||||
| JP52042075A | ||||
| JP54103750U | ||||
| JP1228123A | ||||
| JP3095632U | ||||
| JP9181008A | ||||
| JP60146339U |
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office