TiN被膜の連続成膜方法 - jfe Steel Corporation

Title:

TiN被膜の連続成膜方法

Document Type and Number:

Japanese Patent JP4293024

Kind Code:

B2

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Inventors:

Hiraya Tatsuhiko
Hiroshi Yamaguchi
Mineo Muraki

Application Number:

JP2004076941A

Publication Date:

July 08, 2009

Filing Date:

March 17, 2004

Export Citation:

Assignee:

jfe Steel Corporation

International Classes:

C23C16/34; C21D1/26; C23C16/44; C23C30/00

Domestic Patent References:

Attorney, Agent or Firm:

Kenji Sugimura
Kiyoshi Kuruma
Kosaku Sugimura

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