Title:
CONTINUOUS FILM-FORMING APPARATUS AND METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2006307257
Kind Code:
A
Abstract:
To provide a continuous film-forming apparatus for continuously cleaning a substrate and forming an oxide thin-film thereon with an ozone-introducing means, and to provide a method threrefor.
The continuous film-forming apparatus has a vacuum chamber provided with an exhausting means, a film-forming means for depositing a film-forming material on the substrate surface, a transporting means for sequentially supplying the substrate to a film-forming position which faces the film-forming means, and the ozone-introducing means for spraying ozone on the substrate surface, wherein the ozone is sprayed onto the substrate with the use of the ozone-introducing means, right before the substrate is supplied to the film-forming position.
Inventors:
SHIRAI OSAMU
ARAKAWA TOSHIAKI
KANEKO TADASHI
KODERA KYOSUKE
SHIMOKUCHI TATSUYA
OKAMOTO TETSUNAO
ARAKAWA TOSHIAKI
KANEKO TADASHI
KODERA KYOSUKE
SHIMOKUCHI TATSUYA
OKAMOTO TETSUNAO
Application Number:
JP2005129044A
Publication Date:
November 09, 2006
Filing Date:
April 27, 2005
Export Citation:
Assignee:
SHOWA SHINKU KK
International Classes:
C23C14/34; C23C14/56
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Katsumi Miyama
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Katsumi Miyama
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