Title:
CONTINUOUS FIRING FURNACE
Document Type and Number:
Japanese Patent JP2016132581
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a continuous firing furnace which can be operated continuously over a long time and in which recrystallized SiC can be produced efficiently and continuously since plugging due to SiO gas or the like is not caused in an exhaust passage and a deposited material due to the SiO gas does not exist also in the continuous firing furnace.SOLUTION: The continuous firing furnace is used for continuously firing a SiC particle-containing compact at 2,000-2,300°C to produce the recrystallized SiC. The continuous firing furnace is characterized in that the exhaust passage 25 for exhausting the SiO-containing gas existing in the furnace while keeping the temperature thereof at 1,500-1,900°C is arranged in the midst of the continuous firing furnace.SELECTED DRAWING: Figure 4
Inventors:
IWAMOTO MASAHIRO
OHASHI TADAFUMI
HASHIMOTO YOSHINORI
OHASHI TADAFUMI
HASHIMOTO YOSHINORI
Application Number:
JP2015006867A
Publication Date:
July 25, 2016
Filing Date:
January 16, 2015
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
C04B35/565; C04B33/32; F27B9/04; F27D17/00
Domestic Patent References:
| JP2002249385A | 2002-09-06 | |||
| JPH0925112A | 1997-01-28 | |||
| JP2001261442A | 2001-09-26 |
Foreign References:
| WO2007091451A1 | 2007-08-16 |
Attorney, Agent or Firm:
Atomi International Patent Office
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