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Title:
CONTINUOUS HEAT TREATMENT FURNACE AND HEAT TREATMENT METHOD OF SUBSTRATE USING THE SAME
Document Type and Number:
Japanese Patent JP2007120894
Kind Code:
A
Abstract:

To provide a continuous heat treatment furnace superior in energy saving performance and stability in transporting, and capable of easily measuring a temperature of a substrate.

This continuous heat treatment furnace for performing heat treatment on a functional film material while transporting the substrate 1 provided with the functional film material on a base, comprises a rotating shaft 3 vertically mounted and rotated by a driving device, and a transporting tool 6 having beams 5 or wires radially extending from the rotating shaft 3 in the horizontal direction, in plural sets of at least two each, and further comprises a transporting mechanism for transporting the substrate 1 loaded on the transporting tool 6 by continuously or intermittently rotating the transporting tool 6 in the horizontal direction by rotating the rotating shaft 3.


Inventors:
Arai, Makoto
Kondo, Yoshio
Application Number:
JP2005000315866
Publication Date:
May 17, 2007
Filing Date:
October 31, 2005
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
F27B9/16; B65G49/00; B65G49/07; F27B9/34; F27B9/36; F27B9/38; F27B9/39; H01L21/677; F27B9/00; B65G49/00; B65G49/07; F27B9/30; H01L21/67