To suppress increase of a device scale and a processing scale in a measuring system of the degree of vacuum, and to measure the degree of vacuum accurately, easily and quickly in a wide range from the low degree of vacuum (atmospheric pressure) to the high degree of vacuum.
A measuring processing system 4 observes respectively a plurality of discharge currents versus characteristics of the degree of vacuum relative to each different applied voltage in a detection part 3 of the degree of vacuum. Each of the plurality of observed discharge currents versus characteristics of the degree of vacuum is stored, and characteristic data of the degree of vacuum acquired by connecting each characteristic of the degree of vacuum in the plurality of discharge currents versus characteristics of the degree of vacuum are generated. The characteristic data of the degree of vacuum are generated in connected characteristic data of the degree of vacuum acquired by connecting prescribed ranges of the degree of vacuum, inclination-corrected characteristic data of the degree of vacuum wherein an inclination is corrected, and deformation-corrected characteristic data of the degree of vacuum wherein deformations are corrected into substantial straight lines and connected.
KIOKA SHUNEI
YAMAGISHI KIKUO
