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Patent Searching and Data


Title:
CONTROL DEVICE OF IONIZATION GAUGE
Document Type and Number:
Japanese Patent JPH06129934
Kind Code:
A
Abstract:

PURPOSE: To freely set a pressure at a boundary in which an emission current is to be increased or decreased by a method wherein a circuit which compares a pressure value with a set value is connected to an emission control circuit, a circuit which outputs the set value is made variable and its output is changed via an output circuit.

CONSTITUTION: When an ionization gauge is actuated, a filament is lit up, a prescribed minimum emission current flows and a pressure measurement is started. Then, a signal corresponding to a pressure is output from a pressure- signal output circuit 1, its output is compared with a high-pressure-side set value HP at a setting circuit 5 by a comparison circuit 2, and it is compared with a low-pressure-side set value LP by a comparison circuit 3. According to outputs from the comparison circuits 2, 3, an emission control circuit 4 is actuated, and an emission current corresponding to the pressure is changed over. When an output from the setting circuit 5 is changed via an input circuit 6, the HP and/or LP values as a boundary in which the emission current is to be incraesed or decreased can be changed.


Inventors:
SAITO NORIYUKI
SUGIYAMA MASAYUKI
Application Number:
JP30630892A
Publication Date:
May 13, 1994
Filing Date:
October 20, 1992
Export Citation:
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Assignee:
ANELVA CORP
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Attorney, Agent or Firm:
Suzuki Seiji