CONTROL DEVICE AND STORAGE MEDIUM

Title:

CONTROL DEVICE AND STORAGE MEDIUM

Document Type and Number:

Japanese Patent JP2023155484

Kind Code:

A

Abstract:

To provide a technique that suppresses the generation of particles at or near the center of a substrate surface.SOLUTION: A control device causes a substrate processing apparatus to execute the following (A) to (D). (A) A processing liquid is supplied to the center position of a rotating substrate surface. (B) The supply position of the processing liquid is moved from the center position to a first eccentric position. (C) A replacement liquid to replace the processing liquid is supplied to a second eccentric position different from the first eccentric position. (D) The supply position of the processing liquid is moved from the first eccentric position in a direction opposite to the center position, and the supply position of the replacement liquid is moved from the second eccentric position to the center position.SELECTED DRAWING: Figure 6

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Inventors:

SAKURAI HIROKI
KOSAI KAZUKI
SHINOHARA KAZUYOSHI

Application Number:

JP2023142630A

Publication Date:

October 20, 2023

Filing Date:

September 04, 2023

Export Citation:

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Assignee:

TOKYO ELECTRON LTD

International Classes:

H01L21/304

Attorney, Agent or Firm:

Tadashige Ito
Tadahiko Ito

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