Title:
制御装置、及び該制御装置を備えた真空ポンプ
Document Type and Number:
Japanese Patent JP7164471
Kind Code:
B2
Abstract:
The present invention provides a control apparatus which is capable of realizing a magnetic bearing with reduced vibration and noise by preventing noise from contaminating a current controlled variable and which achieves cost reduction and downsizing of a circuit, and provides a vacuum pump including the control apparatus. A constant storage portion 1 stores constant values of an electromagnet coil 111 including a resistance value Rm, an inductance Lm, a sampling time Ts, etc. A current storage portion 3 stores previous current command values Ir having been regularly sampled by a microcomputer inside a current control circuit 137. A low-frequency feedback circuit 5 generates a signal for suppressing an error between DC components and low-frequency components of an input current command value Ir and a detected current value IL and outputs the signal. An output voltage computing circuit 7 calculates, based on the input current command value Ir[n + 1], a stored value Ir[n] of the current storage portion, a stored value of a constant storage portion, and the signal of the low-frequency feedback circuit 5, a voltage for suppling the electromagnet coil 111 with a current in accordance with a command, and outputs the calculated voltage.
Inventors:
Toshiaki Kawashima
Application Number:
JP2019048517A
Publication Date:
November 01, 2022
Filing Date:
March 15, 2019
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
| JP11159530A | ||||
| JP2014137116A |
Attorney, Agent or Firm:
Masatoshi Shiina
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