Title:
制御装置、制御システム、制御方法、プログラム及び機械学習装置
Document Type and Number:
Japanese Patent JP7019513
Kind Code:
B2
Abstract:
A control device (4) that controls a target vacuum pump (3) including a motor (31), including: a decision unit (452) that decides, using at least one of target state quantities at a time of a past stop process of the target vacuum pump or another vacuum pump wherein the target state quantities are state quantities which fluctuate in accordance with a load at a time of a process of stopping a vacuum pump, a normal fluctuation range or a normal time fluctuation behavior of the target state quantity at the time of the stop process; and a control unit (451) that controls the motor, wherein the control unit compares the target state quantity at the time of the process of stopping the target vacuum pump with the normal fluctuation range or the normal time fluctuation behavior, and changes a method of controlling the motor during the stop process depending on the comparison result.
Inventors:
Mai Ogumi
Tetsuro Sugiura
Atsushi Shiokawa
Tetsuro Sugiura
Atsushi Shiokawa
Application Number:
JP2018107889A
Publication Date:
February 15, 2022
Filing Date:
June 05, 2018
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B49/06; F04B37/16; F04C25/02; F04D19/04
Domestic Patent References:
| JP2009097349A | ||||
| JP2005009337A | ||||
| JP10073088A | ||||
| JP2008524493A |
Foreign References:
| WO2017042949A1 | ||||
| KR101835467B1 | ||||
| WO2011145444A1 |
Attorney, Agent or Firm:
Seiji Ohno
Hideki Kobayashi
Hiroyuki Ohno
Morita Koji
Rika Fukami
Tomohiro Matsuno
Seiichi Sakatani
Hiroshi Nomoto
Hideki Kobayashi
Hiroyuki Ohno
Morita Koji
Rika Fukami
Tomohiro Matsuno
Seiichi Sakatani
Hiroshi Nomoto