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Title:
CONTROL METHOD FOR MAGNETRON, SERVICE LIFE DETERMINATION METHOD FOR MAGNETRON, MICROWAVE GENERATOR, SERVICE LIFE DETERMINING DEVICE FOR MAGNETRON, PROCESSOR AND STORAGE MEDIUM
Document Type and Number:
Japanese Patent JP2007073395
Kind Code:
A
Abstract:

To provide a microwave generator capable of precisely controlling filament temperature of a magnetron for realizing long service life of the magnetron.

This microwave generator is provided with the magnetron 74 wherein a negative electrode 80 comprising a filament 78 and a positive electrode 82 comprising a cavity resonator 84 are arranged facing each other and which generates a microwave by oscillating when provided with a magnetic field, a filament power supply 98 supplying adjustable power to the filament, a filament current measuring part 100, a voltage measuring part 102 measuring the voltage applied to the filament, a resistance value calculation part 104 calculating a resistance value of the filament based on the measured current and voltage, a temperature calculation part 106 calculating the temperature of the filament based on the calculated resistance value and resistance-temperature dependence characteristics of the filament obtained in advance, and a power supply control part 110 controlling a filament power supply so that the temperature of the filament is kept within a prescribed temperature range.


Inventors:
KASAI SHIGERU
OSADA ISATERU
Application Number:
JP2005260204A
Publication Date:
March 22, 2007
Filing Date:
September 08, 2005
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01J23/34; C23C16/511; H01J9/42; H01L21/3065; H01J23/04; H05H1/46
Domestic Patent References:
JPH10233150A1998-09-02
JPH0377240A1991-04-02
JP2003297545A2003-10-17
JPH05151884A1993-06-18
JPH0696679A1994-04-08
JP2004095889A2004-03-25
JPH10223150A1998-08-21
Foreign References:
WO2002058130A12002-07-25
WO2005081302A12005-09-01
Attorney, Agent or Firm:
Akihiro Asai