Title:
位置制御駆動を備えるマイクロエレクトロメカニカルジャイロスコープ及びマイクロエレクトロメカニカルジャイロスコープの制御方法
Document Type and Number:
Japanese Patent JP5498861
Kind Code:
B2
Abstract:
A MEMS gyroscope includes: a microstructure (2) having a fixed structure (6), a driving mass (7), movable with respect to the fixed structure (6) according to a driving axis (X), and a sensing mass (8), mechanically coupled to the driving mass (7) so as to be drawn in motion according to the driving axis (X) and movable with respect to the driving mass (7) according to a sensing axis (Y), in response to rotations of the microstructure (2); and a driving device (3), for keeping the driving mass (7) in oscillation with a driving frequency (É D ). The driving device (3) includes a discrete-time sensing interface (20), for detecting a position (x) of the driving mass (7) with respect to the driving axis (X) and a control stage (21, 23, 24, 25) for controlling the driving frequency (É D ) on the basis of the position (x) of the driving mass (7).
Inventors:
Luciano Prandy
Carlo Kaminada
Carlo Kaminada
Application Number:
JP2010126881A
Publication Date:
May 21, 2014
Filing Date:
June 02, 2010
Export Citation:
Assignee:
STMicroelectronics S.r.l.
International Classes:
G01C19/5776; B81B3/00; G01C19/56
Domestic Patent References:
| JP2007513344A | ||||
| JP2006515423A | ||||
| JP2004028869A | ||||
| JP2008064528A | ||||
| JP2008052175A | ||||
| JP2006170620A | ||||
| JP2002148047A | ||||
| JP2007271611A |
Attorney, Agent or Firm:
Kenji Sugimura
Reiko Otani
Harima Satoko
Reiko Otani
Harima Satoko