Title:
形状測定装置の制御方法
Document Type and Number:
Japanese Patent JP7002892
Kind Code:
B2
Abstract:
When the velocity changing timing of the velocity pattern is not synchronized with the control sampling cycle, the velocity pattern is corrected such that the velocity changing timing of the velocity pattern is synchronized with the control sampling cycle of the shape measuring apparatus.
Inventors:
Takashi Noda
Application Number:
JP2017173576A
Publication Date:
January 20, 2022
Filing Date:
September 08, 2017
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B5/20; G01B21/20
Domestic Patent References:
| JP2008241420A | ||||
| JP2013238573A | ||||
| JP2014021004A | ||||
| JP2014048095A | ||||
| JP6273154A |
Foreign References:
| US5895442 |
Attorney, Agent or Firm:
Koichiro Yoneda
Suzuki Seishiro
Suzuki Seishiro