Title:
CONTROL OF PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JPH0745588
Kind Code:
A
Abstract:
PURPOSE: To prevent the generation of a phenomenon that an excessive current flows between electrodes and the electrodes are made to melt.
CONSTITUTION: In a plasma generating device having a high-frequency power supply 1, an electrode part 2 and an impedance control part 3, an input power detection part 4 for detecting input power, which is applied to the electrode part 2, is provided and the detection part 4 calculates the gradient of the input power and in the case where there is a gradient larger than a set gradient, the detection part 4 stops the supply of the input power and prevents the input power from keeping increasing.
Inventors:
TATSUNARI TOSHITAKA
Application Number:
JP18603293A
Publication Date:
February 14, 1995
Filing Date:
July 28, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01L21/302; H01L21/3065; H05H1/46; (IPC1-7): H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Akira Kobiji (2 outside)