Title:
CONTROL PLATE FOR HIGH CONDUCTANCE VALVE
Document Type and Number:
Japanese Patent JP2023001355
Kind Code:
A
Abstract:
To provide a moveable portion of a fluid control valve that may be actively positioned, anywhere between an extreme open condition and an extreme closed condition, to adjust a flow of fluid passing through the valve.SOLUTION: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.SELECTED DRAWING: Figure 4B
Inventors:
Boo, Kim Goku
Application Number:
JP2022181020A
Publication Date:
January 04, 2023
Filing Date:
November 11, 2022
Export Citation:
Assignee:
Illinois Tours Works Inc.
International Classes:
F16K1/36
Attorney, Agent or Firm:
Aoki Atsushi
Shinji Mihashi
Yuichi Morimoto
Shinji Mihashi
Yuichi Morimoto