Title:
CONTROL SYSTEM FOR FLOW RATE OF FLUID
Document Type and Number:
Japanese Patent JP2000250632
Kind Code:
A
Abstract:
To control the flow rate of a fluid by means of a simple constitution.
An electromagnetic valve 12 and a flow rate sensor 14 are added to a gas pipe 10, the source of an FETQA that is integrated into a semiconductor chip 110 is connected to the valve 12 via a terminal T3 and the source of an FETQB is connected to the sensor 14 via a terminal T4 respectively. When the flow rate detected by the sensor 14 shows the normal value, the FETQA is set in a conductive state and the valve 12 is driven to open the channel of the pipe 10. If the detected flow rate shows the excessive value, the FETQA is set in a non-conductive state and the valve 12 is set in a non- driving state to shut off the channel of the pipe 10.
Inventors:
NAKAYAMA MASAYUKI
Application Number:
JP4967499A
Publication Date:
September 14, 2000
Filing Date:
February 26, 1999
Export Citation:
Assignee:
YAZAKI CORP
International Classes:
G05D7/06; (IPC1-7): G05D7/06
Attorney, Agent or Firm:
Hirotsugu Yoshioka (1 person outside)