Title:
CONTROL UNIT, TEMPERATURE REGULATOR AND HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3925078
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the interference in the control of a treatment means as a controlling subject having an interference and to control the temperature of a matter to be treated by the treatment means to a desired temperature.
SOLUTION: Each treatment point temperature of the matter 101 to be treated by the treatment means 3 is estimated on the basis of the detection temperatures of a plurality of temperature sensors for detecting the temperature of the treatment means 3, and the average temperature and gradient temperature are calculated from the estimated temperature. Each PID control means 61-6n outputs an operation signal so that the average temperature of each gradient temperature is an intended value, and the operation signal from each PID control means 61-6n is distributed by a distribution means 7 to each operation means for applying an operation to the treatment means 3 so that the control by each PID control means 61-6n has not an influence on the control of the other PID control means.
Inventors:
Ikuo Minamino
Ando Kosaku
Narimatsu Seiya
Masahito Tanaka
Ando Kosaku
Narimatsu Seiya
Masahito Tanaka
Application Number:
JP2000353321A
Publication Date:
June 06, 2007
Filing Date:
November 20, 2000
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G05B11/32; H01L21/22; G05B13/02; G05D23/19; H01L21/31; (IPC1-7): G05B11/32; G05D23/19; H01L21/22; H01L21/31
Domestic Patent References:
| JP7283158A | ||||
| JP2000509171A | ||||
| JP11329940A | ||||
| JP6019504A | ||||
| JP58031405A | ||||
| JP2001306103A | ||||
| JP2001296902A | ||||
| JP2001296901A | ||||
| JP2001265447A | ||||
| JP3278807B2 | ||||
| JP1267021A | ||||
| JP1108612A |
Attorney, Agent or Firm:
Kazuhide Okada