Title:
CONTROL VALVE
Document Type and Number:
Japanese Patent JPS5620884
Kind Code:
A
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Inventors:
GERITSUTO ADORUFU HARUTEMINKU
HEIKO YAN FURIMA
HEIKO YAN FURIMA
Application Number:
JP10141280A
Publication Date:
February 26, 1981
Filing Date:
July 25, 1980
Export Citation:
Assignee:
ADVANCED SEMICONDUCTOR MAT
International Classes:
F16K1/00; F16K39/02; F16K41/10; (IPC1-7): F16K1/00; F16K41/10