Title:
CONTROLLED AND SELECTIVE FORMATION OF CATALYST NANOPARTICLES
Document Type and Number:
Japanese Patent JP2009155111
Kind Code:
A
Abstract:
To provide a method for forming catalyst nanoparticles (5) on a substrate (S) and a method for forming elongate nanostructures (9) on a substrate (S) using the nanoparticles (5) as a catalyst.
The methods may advantageously be used in, for example, semiconductor processing. The methods are scalable and fully compatible with existing semiconductor processing technology. Furthermore, the methods allow forming catalyst particles (5) and elongate nanostructures (9) at predetermined locations on a substrate (S).
Inventors:
Esconjauregui, Santiago Cruz
Whelan, Caroline
Whelan, Caroline
Application Number:
JP2007000328744
Publication Date:
July 16, 2009
Filing Date:
December 20, 2007
Export Citation:
Assignee:
INTERUNIV MICRO ELECTRONICA CENTRUM VZW
International Classes:
C01B31/02; B01J23/755; B82B3/00