CONTROLLER FOR THICKNESS OF COATING FILM BY KARMAN-FILTER

Title:

CONTROLLER FOR THICKNESS OF COATING FILM BY KARMAN-FILTER

Document Type and Number:

Japanese Patent JPS62117321

Kind Code:

A

Abstract:

PURPOSE: To determine optimum spinner revolution when a controller is imparted with film thickness, and to form a desired coating film by feedback- controlling a spin coating device through (proportional + integral + differential) control by the controller.

CONSTITUTION: A spin coating device 1 is arranged to a coating-film thickness controller by a Karman.filter, and a spinner revolution determining device 3 is connected to the coating device 1 through a controller 2. Aimed film thickness 5 is added to the device 3 while a coating-film inspection device 4 is connected. A coating-thickness model in which the spinner revolution of a coating film and the temperature dependency of a device and the like are represented is constituted by the controller. The device is feedback-controlled through (proportional + integral + differential) control by the controller 2, and the device 3 determines optimum spinner revolution when the controller 2 is given the aimed film thickness 5, thus forming a desired coating film.

Inventors:

MATSUBA IKUO
MATSUMOTO KUNIAKI
NAKAGOME YOSHIYUKI

Application Number:

JP25656385A

Publication Date:

May 28, 1987

Filing Date:

November 18, 1985

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

B05C11/08; G03F1/00; G03F1/54; G03F7/16; H01L21/027; H01L21/30; (IPC1-7): B05C11/08; G03F1/00; G03F7/16; H01L21/30

Attorney, Agent or Firm:

Katsuo Ogawa

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