To reduce a time when a fine actuator is put in an abnormal state that the displacing quantity continues to be a fixed value, and to reduce any error between a target orbit and an output in the abnormal state.

This controller is provided with an output detecting means 5 for detecting the sum of the displacement of a coarse actuator 4 displacing according to a control signal for the coarse actuator and the displacement of a fine actuator 3 displacing according to a control signal for the fine actuator, and for generating a detected output signal 20, a control means 13 for generating and outputting the control signal for the coarse actuator and a control signal for the fine actuator based on a difference between a target orbit signal and the detected output signal, and a fine control signal limiter 11 for limiting the magnitude of the outputted control signal for the fine actuator to a prescribed value when the magnitude is larger than a preliminarily set value, and for outputting the control signal. The difference of the input and output of the fine control signal limiter 11 is calculated, and a signal based on the calculated difference of the input and output is added to the control signal for the coarse actuator, and the added result is applied to the coarse actuator 4.